TOUMEIGIKEN produces and sells its own ultra-small 
interferometers.
We have a lineup of various Fizeau type laser interferometers with entrance diameters of 4 inches (Φ100 mm), 6 inches (Φ150 mm) and 1.5 inches (Φ38 mm).
Using standard lens (reference lens), it is possible to measure and evaluate glass flat surfaces, polished surfaces such as wafers and mirrors, and lens spheres with small to large diameter with high accuracy of λ / 20.
AK-100ZF laser interferometer body: 4 inches (Φ100mm)
Ultra-compact 4-inch Fizeau laser interferometer.
High quality machine with 6x zoom mechanism.
| Measuring aperture | 4inch(100mm) | Dimensions | W340xD190xH260 mm |
| Light source | He-Ne laser (633nm) | Weight | approx. 14kg |
| Magnification | 1 to 6 times (manual zoom) | Sensor | Standard: 640 x 480 pixel |
| Surface accuracy of reference lens | λ/20 | Power supply | AC100V 50/60Hz 1A |
(※)The sensor can be changed to 3M pixel on request.
AK-100ZF / spherical system: 4 inches (Φ100mm)
Ultra-compact 4-inch Fizeau type laser interferometer system.
High quality machine with 6x zoom mechanism.
The Basic type of AK-100ZF is located with upper vertical. We can also produce AK-100ZF with lower vertical or horizontal.
| Measuring aperture | 4inch (100mm) | Measuring stroke |
Standard: approx. 600 mm |
| Light source | He-Ne laser (633nm) | Sample stand | Φ120mm |
|
Magnification |
1 to 6 times (manual zoom) | Sample adjustment |
5-axis stage |
|
Surface accuracy |
λ/20 |
Installation volume |
W1000xD900xH2000mm |
（※）The anti-vibration table can be changed to a tabletop active anti-vibration table.
（※）The measurement stroke length does not include the height of the lens installation jig.
（※）Installation volume does not include PC rack.
AK-100ZF / Newton checker system: 4 inches (Φ100mm)
Ultra-compact 4-inch Fizeau laser interferometer.
High quality machine with 6x zoom mechanism.
This is the Model that improves the rigidity and stability of the stand and arranges the interferometer body at the bottom for the purpose of a Newton checker .
| >Measuring aperture | 4inch (100mm) | Measuring stroke |
Standard: approx. 600 mm |
| Light source | He-Ne laser (633nm) | Sample stand | Φ120mm |
| Magnification |
1 to 6 times (manual zoom) |
Sample adjustment |
3-axis stage |
| Surface accuracy of reference lens | λ/20 | Installation volume | W400xD400xH1200mm |
（※）The measurement stroke length does not include the height of the lens installation jig.
AK-150ZF laser interferometer body: 6 inches (Φ150mm)
Ultra small 6 inch Fizeau type laser interferometer.
High quality machine with 6x zoom mechanism.
| Measuring aperture | 6inch (150mm) | Dimensions | W758xD316xH316mm |
| Light source | He-Ne laser (633nm) | Weight | approx. 42kg |
| Magnification | 1 to 6 times (manual zoom) | Sensor | Standard: 640 x 480 pixel |
| Surface accuracy of reference lens | λ/20 | Power supply | AC100V 50/60Hz 1A |
（※）Please contact us if you require a high-density sensor.
AK-150ZF / plane system: 6 inches (Φ150mm)
Ultra small 6 inch Fizeau type laser interferometer.
High quality machine with 6x zoom mechanism.
Flat surface accuracy measurement system intended for flat glass, mirrors, wafers, etc.
It can be provided as either a vertical type (left figure) or an X-box type (right figure: bending the optical path 90 ° ).
| Measuring aperture | 6inch (150mm) | Surface accuracy of reference lens | λ/20 |
| Light source | He-Ne laser (633nm) | Sample adjustment | 2-axis stage（α,β-Tilt） |
| Magnification | 1 to 6 times (manual zoom) |
Installation volume |
W1500xD800xH1800mm |
（※）Installation area is for vertical system, PC rack is not included
AK-40ZF laser interferometer body: 1.5 inches (Φ38mm)
Ultra-small 1.5 inch Fizeau type laser interferometer.
High quality machine with 6x zoom mechanism.
| Measuring aperture | 1.5inch (38mm) | Dimensions | W121xD127xH248 mm |
| Light source | He-Ne laser (633nm) | Weight | approx. 4.5kg |
| Magnification | 1 to 6 times (manual zoom) | Sensor | Standard: 640 x 480 pixel |
| Surface accuracy of reference lens | λ/10 | Power supply | AC100V 50/60Hz 1A |
AK-40ZF / spherical system: 1.5 inch (Φ38mm)
Ultra-small 1.5 inch Fizeau type laser interferometer.
High quality machine with 6x zoom mechanism.
It can be provided both vertically_downward (left figure) or vertically_upward (right figure).
| Measuring aperture | 1.5inch (38mm) | Measuring stroke |
Standard: approx. 300 mm |
| Light source | He-Ne laser (633nm) | Sample stand | 60x60mm |
| Magnification | 1 to 6 times (manual zoom) | Sample adjustment |
5-axis stage |
| Surface accuracy of reference lens | λ/10 |
Installation volume |
W250xD250xH800mm |